Profilometer
smartWLI Next
High-end-sensor with motorized objective turret
SmartWLI Next
Description:
The smartWLI next combines the high resolution of a piezo scanner with the advantages of a motorized objective turret.
The sensor can be equipped with one of three different cameras, offering various speed and resolution options.
Various stands, granite gantries, vibration damping systems, and automated tilt stages allow the configuration of custom optical 3D profilers, with the smartWLI next serving as the key component for high-performance measurements.
The SDK, including C++ and C# libraries and source code for sample applications, enables easy integration of the sensor into high-end metrology systems for semiconductor and optics applications.
Key Features:
- Measurement Axis: Piezo positioning system with capacitive sensor and position control
- High-Speed Camera: 1280 × 1024 pixels / 935 Hz, with acceleration up to 10 kHz at reduced number of measurement points
- Height Calculation: Massively parallel real-time processing of image data on GPGPUs (general-purpose graphics processing units / programmable high-performance GPUs)
- SDK: Software libraries in C++ and C# with sample applications and accompanying source code Control of all sensor functions
- Evaluation Algorithms: VSI (Vertical Scanning Interferometry)
- Optional evaluation algorithms: HD-EPSI (High Density – Extended Phase-Shift Interferometry) with small sampling steps Optional Profile Averaging: Averaging over up to 40 individual measurements for noise reduction
- Scanning step sizes: Variable step sizes to optimize resolution and measurement speed
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Types Of SmartWLI Next
• SmartWLI Next 2.3MP camera
• SmartWLI Next 1.3MP camera
• SmartWLI Next 5 MP camera
Specification:
- Scanner - 200 µm piezo positioner
- Objective - motorized turret up to 4 objectives
- Pixel - 1920 x 1200
- Speed - 169 fps full resolution / up to 3.2 kfps with decimation and ROI
- Topography - 0.05 nm
- RMS - 0.005 nm
- Operation - Windows 10 / 11
- Hardware - Core I5, 32 GB RAM, 1 TB SSD, 16 TFLOP GPGPU
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