Large Sample AFM
PARK FX300 IR
The most advanced 300 mm AFM with IR spectroscopy
PARK FX300 IR
Description:
Park FX300 IR is Park Systems’ advanced AFM solution for nanoscale infrared spectroscopy and imaging, combining chemical and surface characterization. It is built on the proven FX300 platform supporting samples up to 300 mm, with low noise, minimal thermal drift, and high mechanical stability, ensuring reliable high-resolution metrology.
FX300 IR supports Photo-induced Force Microscopy (PiFM), enabling both IR spectral analysis and chemical imaging at the nanoscale. Like all Park AFMs, it features an orthogonal scan system and True Non-Contact™ Mode, delivering consistent, non-invasive measurements even on fragile samples.
Automation features such as automatic probe exchange, IR beam alignment, a full 300 mm sample-view camera, and multi-point measurement streamline operation and simplify workflows.
By combining high-performance AFM with advanced IR capability, FX300 IR provides a powerful platform for precise and efficient nanoscale chemical characterization.
Key Features:
- High Spatial Resolution Chemical Imaging
- PiFM with Non-Contact Detection
- Comprehensive Material Characterization
- Automatic IR Laser Alignment
Specification:
-
Scanner - Dual-servo XY scanner (100 μm × 100 μm or 15 μm × 15 μm)
Flexure-guided high-force Z scanner (15 μm or 30 μm) -
Sample Mount - Vacuum grooves for wafers (up to 300 mm)
Multi-wafer chuck for 150 mm wafers (optional) -
On-axis Optics - Direct on-axis vision of sample surface and cantilever
Field of view: 840 μm × 630 μm (w/ 10× objective lens) -
Stage - XY stage: 350 mm × 300 mm
Z stage: 22 mm Automatic Tip Exchanger -
Safety and Facility Features
Photo Ionizer
Facility controller
Emergency Machine Off (EMO) button
Fan Filter Unit (FFU)
Applications:
- Unique applications: Defects on Si wafer, Silicon device, Barium Titanate (BaTiO₃, BTO), Perovskite
- Material & Chemistry: 2D material, Polymer, Blended Polymer, Plastic, Coating, Thin film, Catalyst
- Life Science: Fixed or Living cell membrane, Biomolecular interaction, Tissue, DNA, Bacteria or Virus
- Metal & Semiconductor: Failure analysis on Semiconductor device, Measurements on nanoelectronic device, Thin-film electronics component
- Battery & Energy: Battery material, Fuel cell, Energy harvesting, Ionic conductor
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