Profilometer
smartWLI Nanoscan
sensor with extreme resolution
SmartWLI Nanoscan
Description:
The smartWLI nanoscan is equipped with a higher tube magnification blue LED illumination and a 5 MP camera. This enables the sensor to measure structures with a lateral dimension down to app. 0.4 µm with a spatial sampling down to 0.03 µm.
Various stands, granite portals, vibration dumping systems and automated tip-tilt devices can allows the configuration of customized optical 3d profilers using the smartWLI nanoscan as the key component for high performance measurements.
The SDK including C++ and C# libraries as well as source code for sample application allows the easy integration of the sensor in high end measuring stations for semiconductors and optics.
Key Features:
- Measuring Principle: Massively parallel processing of image data in real time Use of programmable high-performance graphics cards
- scanning device: Software libraries in C++ and C# with sample application and associated source code Control of all sensor functions
- Topography Reproducibility: VSI (Vertical Scanning Interferometry), EPSI (Extended Phase Shift Interferometry) HD-EPSI (High Density – Extended Phase Shift Interferometry) with very small step sizes
- Repeatability RMS: Optional averaging of up to 40 individual measurements for noise reduction
Specification:
- Scanner - 400 µm piezo positioner
- Objective - single objective, manual exchangeable
- Pixel - 2456 x 2054
- Speed - 77 fps full resolution / up to 2 kfps with decimation and ROI
- Topography - 0.05 nm
- RMS - 0.005 nm
- Operation - Windows 10 / 11
- Hardware - Core I5, 32 GB RAM, 1 TB SSD, 16 TFLOP GPGPU
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