Ellipsometer
Accurion EP4
Our Latest Generation of Imaging Ellipsometers Combines Ellipsometry and Microscopy
Accurion EP4
Description:
Accurion EP4, our latest imaging ellipsometer, combines ellipsometry and microscopy for precise characterization of thickness and refractive index on microstructures as small as 1 µm. Unlike conventional ellipsometers, all structures inside the field of view are measured simultaneously. The EP4 provides ellipsometric-contrast live-view, allowing detection of sub-nm features and identification of regions of interest for obtaining values and 3D maps of thickness (0.1 nm – 10 µm) and refractive index. Additional accessories are available to expand measurements under controlled conditions or temperature variations.
Key Features:
- Simultaneous measurement of all pixels inside the field of view → Spectroscopic ellipsometry on each pixel
- Imaging Spectroscopic Ellipsometry from 190/250/360 nm to 1000/1700/2700 nm
- Highest lateral ellipsometric resolution of 1 µm, allowing determination of thickness and refractive index on microstructures as small as 1 µm
- First identify, then measure: Intuitive selection of measurement region by drawing region in live view
- Parallel measurement of multiple regions within the selected field of view
- Knife-edge illumination for non-destructive suppression of disturbing backside-reflections
- Excellent and objective tested lateral resolution / smartWLI nanoscan 115x objective
- Enlarge your measurement possibilities by using additional accessories, e.g. cells, temperature control or liquid handling
- Quality Control: also available as OEM version for QC in product lines
Specification:
-
Ellipsometer Type :
Brewster Angle Microscope (BAM)
Imaging Ellipsometer (IE) in PCSA configuration
Spectroscopic Imaging
Ellipsometer (SIE) in PCSA configuration -
Imaging Optics :
Automatic focus scanner for high-resolution ellipsometric contrast images and maps, 10 × objective (image width – 400 µm, lateral resolution – 2 µm(other objectives with larger field-of-view or higher lateral resolution are available
Ultraobjective for overall focused images (optional): 2 µm lateral resolution, angle of incident range: 52° – 57°. -
Motorized Goniometer :
Patented software controlled motorized goniometer Z stage: 25 mm
Z stage: 25 mm
Focus stage: 15 mm
Angle-of-incidence range: 38 – 90°
Angle resolution: 0.001°
Absolute angle accuracy: 0.01°
Speed of motion: ~ -2.5° / sec.
Z-lift : 10 cm travel range, 1 µm repeatability, 0.5 µm resolution
Applications:
- 2D-Materials
- Curved Surfaces
- Transparent Substrate
- Surface Engineering
- Air-Water Interface
- Anisotropic Films
- MEMS structures as small as 1µm
- Photonics
- Battery Materials
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