Profilometer
smartWLI Extended Range
with a medium range z – stage
SmartWLI Extended Range
Description:
The sensor is the entry level model into the smartWLI product family. The integrated 5 mm axis can be used for automated fast focusing with range detection and automated measurements. This saves time and simplifies the sensor integration into production lines.
The SDK including C++ and C# libraries as well as source code for sample application allows the easy integration of the sensor in high end measuring stations for semiconductors and optics.
Key Features:
- Coherence scanning (white-light) interferometry
- Superior height resolution based on HD-EPSI and profile averaging
- Excellent calibration for superior measurements
- SmartSTITCH the basis for correct high resolution. large area measurements
- Increased acceptance angles
- Outlier free scanning – black silicon
- Excellent and objective tested lateral resolution / smartWLI nanoscan 115x objective
- ISO conform specified lateral period limit DLIM
- For the smartWLI series
Specification:
- Scanner - 5 mm mechanical precision axis
- Objective - single objective, manual exchangeable
- Pixel - 1920 x 1200
- Speed - 169 fps full resolution / up to 3.2 kfps with decimation and ROI
- Topography - 0.05 nm
- RMS - 0.05 nm
- Operation - Windows 10 / 11
- Hardware - Core I5, 32 GB RAM, 1 TB SSD, 16 TFLOP GPGPU
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