Large Sample AFM
PARK NX15
The versatile nanometrology tool for advanced research
PARK NX15
Description:
Park NX15 is a versatile atomic force microscope (AFM) engineered for dependable performance. Its sample stage accommodates full coverage of wafers up to 150 mm, providing a reliable platform for nanoscale metrology in semiconductor and materials research.
The core technology of NX15 lies in Park’s proprietary orthogonal scan system and True Non-contact™ mode. These innovations virtually eliminate lateral motion artifacts while protecting both tip and sample, enabling artifact-free, high-resolution imaging even for delicate or challenging specimens.
From materials science and semiconductors to polymers and bioengineering, NX15 delivers robust performance and dependable results, making it a trusted platform for advanced nanoscale metrology.
Key Features:
- True Non-Contact™ Mode
- Orthogonal Scan System
- Fast Z-Servo Speed
- Easy Probe Exchange
- Intuitive Laser Beam Alignment
- Recipe-Based Sequential Measurement
- Comprehensive Selection of AFM Modes
- Various Sample Chuck Options
- NX Laser Beam Path
- Improved Z Scan Straightness
Specification:
-
Scanner
XY scanner (100 µm × 100 µm)
Flexure-guided high-force Z scanner (15 µm or 30 µm) -
Sample Mount
Vacuum grooves for wafers (up to 150 mm)
Magnetic mount for 16 small samples (optional) -
Stage
XY stage: 150 mm × 150 mm
Z stage: 25 mm
Focus stage: 8 mm -
On-axis Optical Microscope
Direct on-axis vision of sample surface and cantilever
Field of view: 480 µm × 360 µm (w/ 10× objective lens)
CCD: 1.2 M Pixel 5 M Pixel (optional)
Applications:
- Unique applications: 2205 Stainless Steel, Patterned Wafer, Microlens Array, Styrene beads
- Material & Chemistry: 2D material, Polymer, Blended Polymer, Plastic, Coating, Thin film, Catalyst
- Life Science: Fixed or Living cell membrane, Biomolecular interaction, Tissue, DNA, Bacteria or Virus
- Metal & Semiconductor: Failure analysis on Semiconductor device, Measurements on nanoelectronic device, Thin-film electronics component
- Battery & Energy: Battery material, Fuel cell, Energy harvesting, Ionic conductor
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