Large Sample AFM
PARK NX20 300mm
The leading nanometrology tool bridging research and industry
PARK NX20 300mm
Description:
Park NX20 300 mm is an atomic force microscope (AFM) designed for large-sample research and 300 mm wafer failure analysis, making it a key platform for industrial R&D. As Park Systems’ original 300 mm sample AFM, it delivers precise and repeatable nanoscale measurements and is also widely used in academia. Building on these strengths, NX20 300 mm serves as a bridge for facilities transitioning from research-scale AFM to inline production.
At the core of the NX20 300 mm are Park Systems’ proprietary orthogonal scan system and True Non-contact™ mode, innovations that virtually eliminate lateral motion artifacts while protecting both tip and sample. Together, these technologies ensure artifact-free, high-resolution imaging even for the most delicate or challenging samples.
From materials science and semiconductors to polymers and bioengineering, the NX20 300 mm delivers robust performance and dependable results, making it a trusted platform for advanced nanoscale metrology.
Key Features:
- True Non-Contact™ Mode
- Orthogonal Scan System
- Fast Z-Servo Speed
- Easy Probe Exchange
- Intuitive Laser Beam Alignment
- Recipe-Based Sequential Measurement
- Comprehensive Selection of AFM Modes
- Various Sample Chuck Options
- NX Laser Beam Path
- Improved Z Scan Straightness
Specification:
-
Scanner
Dual-servo XY scanner (100 µm × 100 µm)
Flexure-guided high-force Z scanner (15 µm or 30 µm) -
Sample Mount
Vacuum grooves for wafers (up to 300 mm) -
Stage
XY stage : 300 mm × 300 mm
Z stage: 25 mm
Focus stage: 8 mm -
On-axis Optical Microscope
Direct on-axis vision of sample surface and cantilever
Field of view: 840 µm × 630 µm (w/ 10× objective lens)
CCD: 5 M pixels
Applications:
- Unique applications: Cu Pad Oxidation, Artificial Spin Ice lattice, PMN-PT, Polyvinyl Alcohol (PVA) Transfer
- Material & Chemistry: 2D material, Polymer, Blended Polymer, Plastic, Coating, Thin film, Catalyst
- Life Science: Fixed or Living cell membrane, Biomolecular interaction, Tissue, DNA, Bacteria or Virus
- Metal & Semiconductor: Failure analysis on Semiconductor device, Measurements on nanoelectronic device, Thin-film electronics component
- Battery & Energy: Battery material, Fuel cell, Energy harvesting, Ionic conductor
Ready to Work With Podhikai Scientific?
Take the next step in strengthening your laboratory or research facility with
reliable scientific instruments. Contact us to discuss your requirements or
learn more about our solutions.