Ellipsometer
Accurion Simon
Your Entry to Imaging Ellipsometry
Accurion Simon
Description:
SIMON is specifically designed for routine measurement tasks. Its simple user interface and robustness of a fixed angle ellipsometer enables the entry to imaging ellipsometry. It can be operated in two different modes. The microscopic mode is very fast and allows visualisations of variations and defects in the thinnest layers (e.g., monolayers: d = 0.35 nm), whereas the ellipsometric mode measures thickness and the refractive index of the sample materials. Imaging Ellipsometry itself combines the sensitivity of thickness and refractive index measurements with the imaging capabilities of microscopy. This allows for determining thickness and refractive index variations with microscopic images of e.g., micro-structured samples. Typical applications include the surface inspection of homogeneities and defects in large samples in quality control or the fast localization of flakes of 2D materials
Key Features:
- Easy-to-use entry-level Imaging Ellipsometer
- Imaging Ellipsometry with a lateral ellipsometric resolution down to 1 µm
- Thickness and refractive index measurements of microstructures
- Fast visualization of layer thickness distribution and hidden defects on large areas
- Perfect addition for every non-imaging ellipsometer
Specification:
-
Ellipsometer Type - Imaing Ellipsometer (IE) or Spectroscopic Imaging Ellipsometer (SIE)
Lateral Ellipsometric Resolution - 2µm
Ellipsometer Type - Imaing Ellipsometer (IE) or Spectroscopic Imaging Ellipsometer (SIE)
Lateral Ellipsometric Resolution - 2µm
Lateral Ellipsometric Resolution - 2µm Refractive Index (n): [0.001] (Depending on sample substrate) ∆/Ψ : [0.004° / 0.002°] -
Detector Imaing- Monochrome CCD Camera (1392 x 1040 pixels, 12 bits, max. 40 frames per second)
Fixed Angle of Incidence (AOI) Setup: AOI has to be pre-selected: 45°, 53° or 60°
Measurement Principle - Non-contact microscopic surface metrology, using polarized light
Measurement Method - Nulling/rotating compensator
Applications:
- 2D-Materials
- Curved Surfaces
- Transparent Substrate
- Surface Engineering
- Air-Water Interface
- Anisotropic Films
- MEMS structures as small as 1µm
- Photonics
- Battery Materials
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