Large Sample AFM
PARK FX300
The most advanced AFM for 300 mm samples
PARK FX300
Description:
Park FX300 is Park Systems’ latest innovation in atomic force microscopy (AFM), designed to accommodate samples up to 300 mm. With a low noise floor, minimal thermal drift, and enhanced mechanical stability, the FX300 delivers unmatched precision and reliability.
Like all Park AFMs, FX300 features an orthogonal scan system and True Non-contact™ mode, enabling accurate, high-resolution metrology, even on the most delicate or fragile samples.
Key features of FX300 include automatic probe exchange and automatic laser beam alignment; the signatures of FX-series AFMs that streamline operation and enhance productivity. Automated AFM scan parameter settings, sequential measurements across multiple coordinates, and powerful data analysis further simplify complex workflows.
With advanced capabilities and upgraded safety features, the FX300 offers a versatile solution for nanoscale imaging and analysis across both research and industrial settings.
Key Features:
- Lower Noise Floor
- Minimal Thermal Drift
- Orthogonal Scan System
- True Non-Contact™ Mode
- Automatic Probe Exchange
- Automatic Laser Beam Alignment
- Safety and Facility Features
- Improved Acoustic Enclosure
- Live Monitoring Camera
- Environmental Sensing
Specification:
-
Scanner - Dual-servo XY scanner (100 μm × 100 μm or 15 μm × 15 μm)
Flexure-guided high-force Z scanner (15 μm or 30 μm) -
Sample Mount - Vacuum grooves for wafers (up to 300 mm)
Multi-wafer chuck for 150 mm wafers (optional) -
On-axis Optics - Direct on-axis vision of sample surface and cantilever
Field of view: 840 μm × 630 μm (w/ 10× objective lens) -
Stage - XY stage: 350 mm × 300 mm
Z stage: 22 mm Automatic Tip Exchanger -
Safety and Facility Features
Photo Ionizer
Facility controller
Emergency Machine Off (EMO) button
Fan Filter Unit (FFU)
Applications:
- Unique applications: Defects on Si wafer, Silicon device, Barium Titanate (BaTiO₃, BTO), Perovskite
- Material & Chemistry: 2D material, Polymer, Blended Polymer, Plastic, Coating, Thin film, Catalyst
- Life Science: Fixed or Living cell membrane, Biomolecular interaction, Tissue, DNA, Bacteria or Virus
- Metal & Semiconductor: Failure analysis on Semiconductor device, Measurements on nanoelectronic device, Thin-film electronics component
- Battery & Energy: Battery material, Fuel cell, Energy harvesting, Ionic conductor
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