Large Sample AFM
PARK FX200
The most advanced AFM for 200 mm samples
PARK FX200
Description:
Park FX200 is Park Systems’ latest innovation in atomic force microscopy (AFM), designed to accommodate samples up to 200 mm. With a low noise floor, minimal thermal drift, and enhanced mechanical stability, the FX200 delivers unmatched precision and reliability.
Like all Park AFMs, FX200 features an orthogonal scan system and True Non-contact™ mode, enabling accurate, high-resolution metrology, even on the most delicate or fragile samples.
Key features of FX200 include automatic probe exchange, automatic laser beam alignment, and a full 200 mm sample view camera; the signatures of FX-series AFMs that streamline operation while significantly enhancing productivity. Additional capabilities such as automated scan parameter optimization, optical autofocus, sequential measurements across multiple positions, and powerful data analysis tools further simplify even the most complex workflows.
With advanced capabilities and a user-friendly interface, the FX200 offers a versatile solution for nanoscale imaging and analysis across both research and industrial settings.
Key Features:
- Lower Noise Floor
- Minimal Thermal Drift
- Orthogonal Scan System
- True Non-Contact™ Mode
- Automatic Probe Exchange
- Automatic Laser Beam Alignment
- Sample-View Camera
- Improved Acoustic Enclosure
- Live Monitoring Camera
Specification:
-
Scanner - Dual-servo XY scanner (100 μm × 100 μm or 15 μm × 15 μm)
Flexure-guided high-force Z scanner (15 μm or 30 μm) -
On-axis Optics - Direct on-axis vision of sample surface and cantilever
Up to 16 small samples with vacuum chuck (optional) -
On-axis Optics - Direct on-axis vision of sample surface and cantilever
Direct on-axis vision of sample surface and cantilever -
Sample View Camera - Large field of view for 200 mm sample overview
Resolution: 3,840 × 2,160 pixels -
Stage - XY stage: 300 mm × 200 mm
Z stage: 22 mm - Automatic Tip Exchanger - 16 pre-aligned probes with kinematic mount and QR code chip carrier
Applications:
- Unique applications: Cu Pad Oxidation, Artificial Spin Ice lattice, PMN-PT, Polyvinyl Alcohol (PVA) Transfer
- Material & Chemistry: 2D material, Polymer, Blended Polymer, Plastic, Coating, Thin film, Catalyst
- Life Science: Fixed or Living cell membrane, Biomolecular interaction, Tissue, DNA, Bacteria or Virus
- Metal & Semiconductor: Failure analysis on Semiconductor device, Measurements on nanoelectronic device, Thin-film electronics component
- Battery & Energy: Battery material, Fuel cell, Energy harvesting, Ionic conductor
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