Ion scattering spectroscopy
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- Ion scattering spectroscopy
Types of Techniques
- Inductively coupled plasma-optical emission spectrometry (ICP-OES)
- UV-Vis spectroscopy
- X-Ray fluorescence (XRF)
- Atomic absorption spectroscopy (AAS)
- Time-Resolved Photoluminescence Spectroscopy (TRPL)
- X-Ray Photoelectron Spectroscopy (XPS)
- Auger Electron Spectroscopy (AES)
- Fourier Transform Infrared Spectroscopy (FTIR)
- Atomic Fluorescence Spectroscopy (AFS)
- Infrared (IR) spectroscopy
- Nuclear Magnetic Resonance Spectroscopy
- Time of Flight Secondary Ion Mass Spectrometry (Tof-SIMS)
- Spectrophotometer
- Mössbauer Spectroscopy
- ultra violet photoelectron spectroscopy
- Electron Paramagnetic Resonance (EPR)
- Glow Discharge Optical Emission Spectrometry
- X-ray Reflectivity (XRR)
- Total Reflection-TXRF
- Ion scattering spectroscopy (ISS)
- Rutherford Backscattering Spectrometry (RBS)
- ToF Elestic Recoil Detection
- Spectroscopic Ellipsometry
Ion scattering spectroscopy (ISS)

Ion Scattering Spectroscopy (ISS) is a surface analysis technique used to determine the elemental composition and structure of materials. Here’s an overview of its principles and applications:
Principle
Applications
Advantages
Sample Requirement
Principle
Ion Scattering Spectroscopy involves bombarding a solid surface with a beam of noble gas ions (typically helium or neon). When these ions strike the surface, they scatter off the atoms in the top few atomic layers. The energy and angle of the scattered ions are measured to determine the elemental composition and structural arrangement of atoms on the surface.
Applications
- Materials Science: Characterizing thin films, coatings, and semiconductor surfaces.
- Metallurgy: Analyzing metal surfaces and interfaces for composition and structure.
- Surface Chemistry: Studying surface reactions and catalytic processes.
- Quality Control: Assessing surface cleanliness and composition in manufacturing.
Advantages
- High Sensitivity: Detects elements even at low concentrations on the surface.
- Versatility: Applicable to a wide range of materials and surface types.
- Real-Time Analysis: Provides rapid feedback on surface composition.
- Non-Destructive: Suitable for analyzing delicate samples without altering their surface properties.
Sample Requirement
A sample size that fits within the instrument’s capabilities (usually a few centimeters in diameter) is sufficient.