Electron Probe Micro Analysis
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- Electron Probe Micro Analysis
Types of Techniques
- Atomic Force Microscopy (AFM)
- Field Emission-Scanning Electron Microscopy (FESEM)
- Optical microscope
- Transmission Electron Microscopy (TEM)
- Scanning Acoustic microscopy
- Confocal Micro/Nano Photoluminescence Spectroscopy (PL)
- Confocal micro /nano Raman spectroscopy
- Focused Ion Beam – Scanning Electron Microscopy
- Electron Probe Micro Analysis (EPMA)
- Focused Ion Beam (FIB)
- Infinite Focus Microscopy
- Cathodo lumiscence
Electron Probe Micro Analysis (EPMA)

Electron Probe Micro Analysis (EPMA) is a highly advanced analytical technique used to determine the chemical composition of small volumes of solid materials with exceptional precision and accuracy. Ideal for fields such as materials science, geology, and metallurgy, EPMA provides detailed insights into the elemental makeup of your samples.
EPMA involves bombarding a sample with a focused electron beam and analyzing the characteristic X-rays emitted. These X-rays are produced when the electron beam interacts with the atoms in the sample, leading to the emission of element-specific X-rays. By measuring these X-rays, EPMA can precisely determine the elemental composition of the sample.
- Materials Science: Analyzing the composition of metals, ceramics, and composites to understand their properties and performance.
- Geology: Determining the mineral composition of rocks and ores for geological mapping and resource exploration.
- Metallurgy: Investigating the microstructure and composition of metals and alloys to optimize manufacturing processes.
- Electronics: Characterizing semiconductor materials and components to ensure quality and performance.
- Precise Elemental Analysis: Achieves accurate and reliable quantitative results for a wide range of elements.
- High Resolution: Analyzes tiny areas with high spatial resolution, ideal for heterogeneous samples.
- Elemental Mapping: Provides visual representation of elemental distribution, aiding in material characterization.
- Non-Destructive Testing: Allows for repeated analysis of the same sample.
Samples should generally be at least a few millimeters in size, depending on the specific instrument’s capabilities.