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Focused Ion Beam – Scanning Electron Microscopy
Types of Techniques
- Atomic Force Microscopy (AFM)
- Field Emission-Scanning Electron Microscopy (FESEM)
- Optical microscope
- Transmission Electron Microscopy (TEM)
- Scanning Acoustic microscopy
- Confocal Micro/Nano Photoluminescence Spectroscopy (PL)
- Confocal micro /nano Raman spectroscopy
- Focused Ion Beam – Scanning Electron Microscopy
- Electron Probe Micro Analysis (EPMA)
- Focused Ion Beam (FIB)
- Infinite Focus Microscopy
- Cathodo lumiscence
Focused Ion Beam – Scanning Electron Microscopy
Focused Ion Beam – Scanning Electron Microscopy (FIB-SEM) is an advanced microscopy technique that integrates two powerful imaging and micro-manipulation methods into a single instrument. It combines the capabilities of a Focused Ion Beam (FIB) system for precise material removal and a Scanning Electron Microscope (SEM) for high-resolution imaging and analysis. FIB-SEM is widely used in materials science, nanotechnology, semiconductor industry, and biological research for its ability to provide detailed 3D structural information and perform intricate nanoscale modifications.
Principle
Applications
Advantages
Sample Requirement
Principle
Focused Ion Beam (FIB):
- Ion Milling: Uses a focused beam of gallium ions to selectively mill away material layer by layer with nanometer precision.
- Cross-sectioning: Creates precise cross-sections of samples for detailed analysis.
- Imaging: Generates high-resolution images of the sample surface using electron beams.
- Analysis: Provides elemental analysis and surface morphology characterization.
Applications
Materials Science:
- Analyzing microstructures, defects, and interfaces in metals, ceramics, and composites.
- Studying nano-scale features and properties of advanced materials.
- Failure analysis of integrated circuits (ICs), identifying defects and analyzing device structures.
- Circuit editing and prototyping through focused ion beam lithography.
- Imaging biological samples such as cells, tissues, and biomaterials at high resolution.
- 3D reconstruction of cellular structures and organelles.
Advantages
- High Resolution: Provides detailed imaging and analysis at nanoscale resolutions.
- 3D Reconstruction: Constructs 3D models of samples from sequential cross-sectioning.
- Material Modification: Allows precise milling and deposition of materials for device fabrication and repair.
Sample Requirement
- Size: Samples should fit within the dimensions compatible with our FIB-SEM equipment. Typically, samples should not exceed 10 mm x 10 mm x 5 mm.
- Shape: Ideally, samples should have a flat surface to ensure stability during imaging and milling.