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Energy-dispersive X-ray spectroscopy

Energy-dispersive X-ray spectroscopy (EDS)

EDS is a powerful non-destructive technique used for the qualitative and quantitative elemental analysis of the solid sample. This analysis has been widely used in various industries in failure analysis and research and development of product material. This technique can effectively study the elements from carbon to uranium present in the periodic table. In this technique, high energy electrons were injected into the sample to study the various phenomenon. The interaction between the electron and sample leads to the production of primary electrons, Secondary electrons, Auger electrons and Characteristic X-rays. The ejected characteristic X-ray has been detected using the EDS detector to study the elemental analysis. The characteristic peaks are compared with the standard data to identify and quantify the elements present in the sample. The EDS analysis coupled with SEM, STEM and TEM can provide the lateral elemental distribution. Further, this can offer the point scan, line scan and elemental mapping of the sample to obtain the different elemental information.

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